The principle of Michelson interferometer is that a beam of incident light is divided into two beams through the spectroscope, and each is reflected back by the corresponding plane mirror, because the two beams of light have the same frequency, the same vibration direction and the constant phase difference (that is, meet the interference conditions), so interference can occur. The different optical paths of the two beams in the interference can be achieved by adjusting the length of the interference arm and changing the refractive index of the medium, so that different interference patterns can be formed. The interference fringes of equal thickness and equal inclination can be generated by adjusting the interferometer. The principle can be used to develop a variety of measuring instruments.
The system uses the core tomorrow P63.Z piezoelectric nanopositioning platform as a phase shifter, the phase shift stroke is 0~6.8μm, the phase shift resolution can reach 0.1nm, the response speed of the full stroke 6.8μm motion range is 0.3ms, and the nanoscale step scanning speed will be faster.
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