Sheet-shaped piezoelectric ceramics are square or ring sheets with a standard thickness of 2mm. The maximum displacement of a single chip can reach 3.3 μm.
Stacked piezoelectric ceramics are used after stacking multiple piezoelectric ceramic sheets and welding common electrodes. The height is freely selected. The displacement after stacking is the total displacement of each sheet, and the maximum can reach 326.7μm. Customized UHV version, withstand voltage up to 10 ^10torr=1.33×10^10mbar.
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