When it is necessary to dispense microliters or nanoliters of volume, it requires very precise movement to control the distribution. Piezo actuators actuating diaphragm pumps or valves are common solution. By applying voltage to piezo actuators, the displacement and speed can be changed to achieve the purpose of microliter or nanoliter distribution. The displacement of the piezo actuator determines the distribution volume, and the operating frequency of the actuator controls the flow. The piezo actuator has the advantages of high resolution, small size, easy integration, and low power consumption.
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#Lithography #Pneumatic Valve #Sensor #Laser Cavity Tuning #Microliter and Nanoliter Distribution and Nanoliter Distribution